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Strany 1 - ADT 7100

Your Resource for Advanced Dicing SolutionsADT 7100Dicing SeriesVectus/Fortis Model TypesOperations ManualSoftware Version 5.6.3P/N 97100-9002-000-14J

Strany 2

Reference DocumentsAdvanced Dicing Technologies Ltd.xReference Documents• ADT Model 7100 Semi-Automatic Dicing System Maintenance Manual. It provides

Strany 3 - RECORD OF CHANGES

Placing/Removing a WorkpieceAdvanced Dicing Technologies Ltd.3.5-2

Strany 4 - SAFETY FIRST

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModel 7100 WorkflowsP/N 97100-9002-000-14 Ver 06/053.6-13.6 Model 7100 WorkflowsThe work

Strany 5 - Safety Features

Model 7100 WorkflowsAdvanced Dicing Technologies Ltd.3.6-2For additional information about Defining Jobs, see section 3.4. For additional information

Strany 6 - Safety First

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModel 7100 WorkflowsP/N 97100-9002-000-14 Ver 06/053.6-33.6.2 Auto Mode Workflow - New R

Strany 7

Model 7100 WorkflowsAdvanced Dicing Technologies Ltd.3.6-4Inspection Illumination: Teaching the Inspection Illumination for the best view of the workp

Strany 8 - BEFORE YOU BEGIN

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModel 7100 WorkflowsP/N 97100-9002-000-14 Ver 06/053.6-53.6.3 Manual Mode WorkflowWhen o

Strany 9 - Contents at a Glance

Model 7100 WorkflowsAdvanced Dicing Technologies Ltd.3.6-63.6.4.1 Defining JobsWhen defining jobs, the User selects a Recipe to be assigned to a Workp

Strany 10 - Reference Documents

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModel 7100 WorkflowsP/N 97100-9002-000-14 Ver 06/053.6-73.6.4.5 Manual AlignmentWhen per

Strany 11 - CONVENTIONS

Model 7100 WorkflowsAdvanced Dicing Technologies Ltd.3.6-8

Strany 12 - Abbreviations and Acronyms

ADT Model 7100 Semi-Automatic Dicing System Operations ManualStopping System OperationP/N 97100-9002-000-14 Ver 06/053.7-13.7 Stopping System Operati

Strany 13 - TABLE OF CONTENTS

ADT Model 7100 Semi-Automatic Dicing System Operations ManualConventionsP/N 97100-9002-000-14 Ver 06/05xiCONVENTIONSThis section explains basic symbol

Strany 14

Stopping System OperationAdvanced Dicing Technologies Ltd.3.7-23.7.3 Pausing a ProcessWhen running in Auto mode, System operation can be paused at any

Strany 15 - _______________________6.4-1

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLog FileP/N 97100-9002-000-14 Ver 06/053.8-13.8 Log FileThe Model 7100 software generate

Strany 16

Log FileAdvanced Dicing Technologies Ltd.3.8-2Time and Date SettingsBy default, the Time and Date setting for the current Log File is twelve hours bac

Strany 17

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLog FileP/N 97100-9002-000-14 Ver 06/053.8-33.8.3 Exporting Log FilesLog data can be exp

Strany 18

Log FileAdvanced Dicing Technologies Ltd.3.8-4

Strany 19 - LIST OF FIGURES

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAdministrationP/N 97100-9002-000-14 Ver 06/054-14 ADMINISTRATIONAccess Levels are catego

Strany 20 - List of Figures

AdministrationAdvanced Dicing Technologies Ltd.4-2

Strany 21

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAccess LevelsP/N 97100-9002-000-14 Ver 06/054.1-14.1 Access LevelsThere are five Access

Strany 22

Access LevelsAdvanced Dicing Technologies Ltd.4.1-2

Strany 23

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModifying Access LevelsP/N 97100-9002-000-14 Ver 06/054.2-14.2 Modifying Access LevelsUs

Strany 24

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAdvanced Dicing Technologies Ltd.xiiAbbreviations and AcronymsA AmpsBBD Broken Blade Dete

Strany 25 - LIST OF TABLES

Modifying Access LevelsAdvanced Dicing Technologies Ltd.4.2-2To Modify Access Rights to Parameters:1 Double-click anywhere in the access rights column

Strany 26 - List of Tables

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModifying Access LevelsP/N 97100-9002-000-14 Ver 06/054.2-3Importing and Exporting Recip

Strany 27 - 1 INTRODUCTION

Modifying Access LevelsAdvanced Dicing Technologies Ltd.4.2-42 The existing access rights for the selected element appear in a multi-colored bar, as f

Strany 28 - 1.3 Modes of Operation

ADT Model 7100 Semi-Automatic Dicing System Operations ManualModifying Access LevelsP/N 97100-9002-000-14 Ver 06/054.2-54.2.3 Protected ModeThe Model

Strany 29 - 1.5 Options

Modifying Access LevelsAdvanced Dicing Technologies Ltd.4.2-6with access to unprotected mode but with no ability to modify the access rights of other

Strany 30 - Introduction

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAdding and Removing UsersP/N 97100-9002-000-14 Ver 06/054.3-14.3 Adding and Removing Use

Strany 31 - 1.6 Available Models

Adding and Removing UsersAdvanced Dicing Technologies Ltd.4.3-2

Strany 32 - Available Models

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBuilding RecipesP/N 97100-9002-000-145-15 BUILDING RECIPESRecipes are the settings, algor

Strany 33

Building RecipesAdvanced Dicing Technologies Ltd.5-2• The type of blade to be used for this recipe, including the size, exposure, and thickness.• The

Strany 34

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBuilding Recipes WorkflowP/N 97100-9002-000-14 Ver 06/055.1-15.1 Building Recipes Workfl

Strany 35 - 2 SYSTEM DESCRIPTION

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsP/N 97100-9002-000-14 Ver 06/05xiiiTABLE OF CONTENTSSafety First _____

Strany 36 - System Description

Building Recipes WorkflowAdvanced Dicing Technologies Ltd.5.1-2

Strany 37 - 2.1 Main Subsystems

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCreating a New RecipeP/N 97100-9002-000-14 Ver 06/055.2-15.2 Creating a New RecipeWhen f

Strany 38

Creating a New RecipeAdvanced Dicing Technologies Ltd.5.2-2create a new Template Recipe that will be kept permanently, type "Template_" befo

Strany 39 - 2.1.1.3 Power Lights

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining Recipe PropertiesP/N 97100-9002-000-14 Ver 06/055.3-15.3 Defining Recipe Proper

Strany 40 - 2.1.2 Dicer

Defining Recipe PropertiesAdvanced Dicing Technologies Ltd.5.3-2To Define Recipe Properties:1 Click to display the Programming Workspace.Author The

Strany 41 - 2.1.2.1.2 Illumination

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining Recipe PropertiesP/N 97100-9002-000-14 Ver 06/055.3-32 Select the Recipe from t

Strany 42 - 2.1.3 Light Tower

Defining Recipe PropertiesAdvanced Dicing Technologies Ltd.5.3-45.3.1 Defining Blade PropertiesThe blade property of the Recipe specifies the name of

Strany 43

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining Recipe PropertiesP/N 97100-9002-000-14 Ver 06/055.3-5A list of existing blades

Strany 44 - Main Subsystems

Defining Recipe PropertiesAdvanced Dicing Technologies Ltd.5.3-65.3.2.1 Changing Blades in a RecipeA blade assigned to the recipe can be changed by pe

Strany 45 - 2.2 Graphical User Interface

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining Recipe PropertiesP/N 97100-9002-000-14 Ver 06/055.3-7To Define a new blade:1 Cl

Strany 46 - 2.2.1 Menu Bar

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsAdvanced Dicing Technologies Ltd.xiv3.1.1 Powering Up the System ______

Strany 47 - 2.2.1.4 Manual Menu

Defining Recipe PropertiesAdvanced Dicing Technologies Ltd.5.3-85.3.2.4 Deleting BladesBlades can be deleted from the System by performing the procedu

Strany 48 - 2.2.1.5 Maintenance Menu

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-15.4 Specifying Recipe Pa

Strany 49 - 2.2.2 Toolbar

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-2Table 5-3: Parameter CategoriesParameter Category DescriptionAir Defines the duratio

Strany 50 - Graphical User Interface

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-3Loop cut Defines how to

Strany 51

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-4To Display Recipe Parameters:1 Expand the Recipe in the Programming tree to display

Strany 52 - 2.2.3 Gauges

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-55.4.3 General and Angle

Strany 53 - 2.2.4 Dicer Status Indicator

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-6To Define New Angles:1 In the Programming Workspace, right-click on any existing Ang

Strany 54 - 2.2.7 Blade Indicator

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-7To Move Angle Tabs in th

Strany 55 - 2.2.9 Stop Button

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-82 Click Change to display the following dialog box:3 Enter the new angle, then click

Strany 56 - 2.2.10 Workspaces

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecifying Recipe ParametersP/N 97100-9002-000-14 Ver 06/055.4-92In the Parameter area b

Strany 57

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsP/N 97100-9002-000-14 Ver 06/05xv5.4.2 Monitoring the Cutting Process

Strany 58 - 2.2.10.1 Main Workspace

Specifying Recipe ParametersAdvanced Dicing Technologies Ltd.5.4-10To Modify Parameter Values:1 In the Parameter Table, double-click the Value cell of

Strany 59 - 2.2.10.1.1 Top View Area

ADT Model 7100 Semi-Automatic Dicing System Operations ManualImporting and Exporting RecipesP/N 97100-9002-000-14 Ver 06/055.5-15.5 Importing and Exp

Strany 60 - 2 Lower Limit

Importing and Exporting RecipesAdvanced Dicing Technologies Ltd.5.5-24 [optional] Change the name of the Recipe by entering a new name in the Change R

Strany 61 - 2.2.10.1.2 Side View Area

ADT Model 7100 Semi-Automatic Dicing System Operations ManualImporting and Exporting RecipesP/N 97100-9002-000-14 Ver 06/055.5-34 [optional] Change t

Strany 62 - 2.2.10.2 Video Workspace

Importing and Exporting RecipesAdvanced Dicing Technologies Ltd.5.5-4

Strany 63

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecipe TemplatesP/N 97100-9002-000-14 Ver 06/055.6-15.6 Recipe TemplatesAs explained abo

Strany 64 - 2.2.10.2.2 Display Controls

Recipe TemplatesAdvanced Dicing Technologies Ltd.5.6-25.6.2 APC Loop Cut TemplateFigure 5-24: APC Standard Cut MapAngle 0 Angle 90ParametersWork piece

Strany 65

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecipe TemplatesP/N 97100-9002-000-14 Ver 06/055.6-35.6.3 GPC Standard TemplateFigure 5-

Strany 66

Recipe TemplatesAdvanced Dicing Technologies Ltd.5.6-45.6.4 GPC Multi Die Size TemplateFigure 5-26: GPC Standard Cut MapAngle 0 Angle 90ParametersWork

Strany 67 - To Enable the Zoom Option:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecipe TemplatesP/N 97100-9002-000-14 Ver 06/055.6-55.6.5 Standard Dressing TemplateFigu

Strany 68 - To Use Digital Magnification:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsAdvanced Dicing Technologies Ltd.xvi6.5.4 Chopping _____________________

Strany 69 - 2.2.10.2.5 Wizard/Model Area

Recipe TemplatesAdvanced Dicing Technologies Ltd.5.6-65.6.6 GPC Dressing TemplateAngle 0 Angle 90ParametersWorkpiece Shape RectangularWorkpiece Size 1

Strany 70

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/056-16 DICER PROCEDURESThis chapter contains the instructio

Strany 71

Dicer ProceduresAdvanced Dicing Technologies Ltd.6-2

Strany 72 - 2.2.10.2.7 Other Buttons

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-16.1 Workpiece AlignmentAlignment

Strany 73

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-26.1.1 Manual AlignmentManual Alignment is generally used when there are no eyepoints for Auto

Strany 74 - 2.2.10.4 Workbook Workspace

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-3the location in the FOV. Adjust t

Strany 75

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-4To Define the Cut Position:1 Use the X/Y-Axis Controls to move the Camera to the reference po

Strany 76

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-56.1.2.1 Teach IndexTeaching the I

Strany 77

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-64 Scroll to the Index parameter and click the cell containing the value defined for the Index

Strany 78

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-78 Define a Cut Position (see sect

Strany 79

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsP/N 97100-9002-000-14 Ver 06/05xvii8.8 Database Backup ________________

Strany 80

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-8flashes a score indicating whether the Model has been successfully found and displaying the i

Strany 81

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-9Index is defined and flashed on t

Strany 82

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-10Street: Auto Alignment is performed by finding a Model (repeating pattern) along the Street.

Strany 83 - 2.3 System Configuration

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-11To Select an Align Type:1 Click

Strany 84 - System Configuration

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-126.1.3.2 Performing Teach AlignmentAfter the Align Type has been selected and the Index has b

Strany 85 - 2.4 Menu Navigation Chart

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-13To Perform Teach Alignment:1 Cli

Strany 86 - Menu Navigation Chart

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-1410 Select the confidence level for the Model.11 Teach the Model by using the X/Y-Axis Contro

Strany 87 - 3 SYSTEM OPERATION

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-156.1.3.3.1 Low Model DetectionAft

Strany 88 - System Operation

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-16spiral search starts from the model situated after the third model. The search ending positi

Strany 89 - 3.1.1 Powering Up the System

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-17directional search if needed. If

Strany 90 - Powering Up/Down Procedures

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTable of ContentsAdvanced Dicing Technologies Ltd.xviiiAppendices _______________________

Strany 91 - 3.1.2.1 Lockout/Tagout

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-18sharp enough, the user can teach a sub-model (clear model not on the same street), which wil

Strany 92

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-19The low and sub-models are alway

Strany 93 - 3.2 Logging In

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-20For more information regarding the standard Multi-Panel option, see section 6.5.5.The new op

Strany 94 - Logging In

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-21are added to a recipe as shown i

Strany 95 - 3.3 System Initialization

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-226.1.4.1 Multi-Panel Bar Code IdentificationThe new option “Choice of cutting angle by panel”

Strany 96 - System Initialization

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-236.1.5.2 Align Kerf ModelThe Alig

Strany 97 - 3.4 Defining the Job

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-24the Processing Method for All Models parameter. This parameter provides the Vision with a ca

Strany 98 - Defining the Job

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-25For example, in a ceramic applic

Strany 99

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-26coordinate values. The system uses the first and second Cut Verify models to find their Y co

Strany 100 - Placing/Removing a Workpiece

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-27If the new calculated index is w

Strany 101 - 3.6 Model 7100 Workflows

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresP/N 97100-9002-000-14 Ver 06/05xixLIST OF FIGURESFigure 1-1: Model 7100 P

Strany 102

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-286.1.9 Updating the Workpiece AlignmentOnce the workpiece alignment has been taught, and ther

Strany 103 - Model 7100 Workflows

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWorkpiece AlignmentP/N 97100-9002-000-14 Ver 06/056.1-29This window refers to a specific

Strany 104

Workpiece AlignmentAdvanced Dicing Technologies Ltd.6.1-30

Strany 105 - 3.6.3 Manual Mode Workflow

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut VerificationP/N 97100-9002-000-14 Ver 06/056.2-16.2 Cut VerificationCut Verification

Strany 106 - 3.6.4.3 Teaching Alignment

Cut VerificationAdvanced Dicing Technologies Ltd.6.2-2required cut position and updates the Cut Map created during Alignment. Refer to section 6.1.8 f

Strany 107 - 3.6.4.7 Manual Y Offset

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut VerificationP/N 97100-9002-000-14 Ver 06/056.2-3In case the system fails to detect a

Strany 108

Cut VerificationAdvanced Dicing Technologies Ltd.6.2-4

Strany 109 - 3.7 Stopping System Operation

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-16.3 Kerf CheckingKerf Checking uses the

Strany 110 - 3.7.4 Manual Stop

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-2black/white threshold. The system memorizes the number of checks per cut and the positions, on whic

Strany 111 - 3.8 Log File

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-3Kerf Checks are performed at defined in

Strany 112 - 3.8.2 Log File Find Feature

Advanced Dicing Technologies Ltd.Customer SupportAdvanced Dicing Technologies Ltd.Advanced Technologies CenterHaifa, Israel, 31905Telephone: (+972)-4

Strany 113 - 3.8.4 Periodical backup

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresAdvanced Dicing Technologies Ltd.xxFigure 2-8: Water Overflow Message_____

Strany 114 - Log File

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-4angle. The Kerf Check has to be taught for the second angle before automatic Kerf Checks can be per

Strany 115 - 4 ADMINISTRATION

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-5The distance between the red lines is t

Strany 116 - Administration

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-66.3.4.1 Main Workspace WindowThe Main Workspace Window, in the top left corner of the Video Workspa

Strany 117 - 4.1 Access Levels

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-7Double-clicking on the Model displays a

Strany 118 - Access Levels

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-8be selected from the main screen by activating the pulldown menu next to the Automatic Kerf Check b

Strany 119 - 4.2 Modifying Access Levels

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-93 Add the Activate parameter in Cut Dep

Strany 120 - 4.2.2 User Interface Elements

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-10The Teach Kerf-Check procedure is carried out according to the following attributes: Pattern Type

Strany 121 - Modifying Access Levels

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-11Figure 6-31 below illustrates a user c

Strany 122

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-12including some of the Workpiece beyond the edges of the Kerf, as shown below:7 Set the value for B

Strany 123 - 4.2.3 Protected Mode

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-13• Top Chip Area: The area of all chipp

Strany 124

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresP/N 97100-9002-000-14 Ver 06/05xxiFigure 5-14: Angle Tab Popup Menu _____

Strany 125 - 4.3 Adding and Removing Users

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-14Figure 6-33) in order to enable the user to set values for each step of the process.This feature w

Strany 126 - Adding and Removing Users

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf CheckingP/N 97100-9002-000-14 Ver 06/056.3-156.3.7.1 AdaptiveThis option is intende

Strany 127 - 5 BUILDING RECIPES

Kerf CheckingAdvanced Dicing Technologies Ltd.6.3-16the current cut and not according to the taught one. All the Kerf Check tests are performed on the

Strany 128

ADT Model 7100 Semi-Automatic Dicing System Operations ManualManual Y OffsetP/N 97100-9002-000-14 Ver 06/056.4-16.4 Manual Y OffsetThe Manual Y Offse

Strany 129 - Parameters

Manual Y OffsetAdvanced Dicing Technologies Ltd.6.4-2the center of the Workpiece within which the single cut can be performed.• Define Start Location

Strany 130 - Building Recipes Workflow

ADT Model 7100 Semi-Automatic Dicing System Operations ManualManual Y OffsetP/N 97100-9002-000-14 Ver 06/056.4-36.4.3 Y-Offset Reference PositionsThi

Strany 131 - 5.2 Creating a New Recipe

Manual Y OffsetAdvanced Dicing Technologies Ltd.6.4-4• If the previous cut was on the Dress Block, Y-Offset is performed on the Dress Block.• If there

Strany 132 - Creating a New Recipe

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-16.5 Special Cut ProceduresThis

Strany 133 - Defining Recipe Properties

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-2The cut map and basic parameters for building sub-index recipes are given in section 5.6.

Strany 134 - To Define Recipe Properties:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-33 Define the Last Angle parame

Strany 135

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresAdvanced Dicing Technologies Ltd.xxiiFigure 6-24: Kerf Check Workflow ____

Strany 136

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-46.5.4 Chopping"Chopping” is cutting within the substrate, as opposed to the usual cut

Strany 137

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-5This section contains the foll

Strany 138 - 5.3.2.2 Defining New Blades

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-6by the wizard. At the end of teaching process the following message appears:4 Click Yes.Fi

Strany 139 - To Modify Blade Properties:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-76 Click Yes. At this point the

Strany 140 - To delete a blade:

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-8In case one of the alignment models is not found, the System stops the process and an erro

Strany 141 - 5.4.1 Accessing Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-96.5.5.2 Multipanel AnimationIn

Strany 142 - Specifying Recipe Parameters

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-106.5.5.6 Multi-Panel Cutting SequencesThe Multi-Panel cutting sequences can vary depending

Strany 143

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial Cut ProceduresP/N 97100-9002-000-14 Ver 06/056.5-116.5.6 Cut Depth CompensationW

Strany 144 - To Display Recipe Parameters:

Special Cut ProceduresAdvanced Dicing Technologies Ltd.6.5-12

Strany 145 - Angle 90

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSaw ProceduresP/N 97100-9002-000-14 Ver 06/057-17 SAW PROCEDURESThis chapter includes th

Strany 146 - 5.4.3.1.2 Moving Angle Tabs

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresP/N 97100-9002-000-14 Ver 06/05xxiiiFigure 7-18: 4" Spindle with Coo

Strany 147 - To Modify Angles:

Saw ProceduresZ-Axis SafetyAdvanced Dicing Technologies Ltd.7-2To set the Calibration Start Position:1 Manually set the largest blade in use approxima

Strany 148 - 5.4.3.2.1 Adding Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade ExpansionP/N 97100-9002-000-14 Ver 06/057.2-17.2 Blade ExpansionThere are three bl

Strany 149

Blade ExpansionAdvanced Dicing Technologies Ltd.7.2-2

Strany 150 - 5.4.3.2.3 Deleting Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProceduresP/N 97100-9002-000-14 Ver 06/057.3-17.3 Height ProceduresThe Height pro

Strany 151 - To Export a Recipe:

Height ProceduresAdvanced Dicing Technologies Ltd.7.3-2Process Height can be performed manually at any point during the cutting process. To Manually P

Strany 152 - To Import a Recipe:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProceduresP/N 97100-9002-000-14 Ver 06/057.3-3The user can configure the system t

Strany 153

Height ProceduresAdvanced Dicing Technologies Ltd.7.3-4To Perform Button Height:1 In the Setup & Diagnostics Workbook, select Saw > Dicer >

Strany 154

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProceduresP/N 97100-9002-000-14 Ver 06/057.3-510 Firmly tighten the upper C-clamp

Strany 155 - 5.6 Recipe Templates

Height ProceduresAdvanced Dicing Technologies Ltd.7.3-6contact Height, it can only be done when no Workpiece is present on the Cutting Chuck.To Perfor

Strany 156 - 5.6.2 APC Loop Cut Template

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProceduresP/N 97100-9002-000-14 Ver 06/057.3-7Sample Blade Calibration is perform

Strany 157 - 5.6.3 GPC Standard Template

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of FiguresAdvanced Dicing Technologies Ltd.xxivFigure 9-17: Spindle Holding Screws _

Strany 158 - Recipe Templates

Height ProceduresAdvanced Dicing Technologies Ltd.7.3-8

Strany 159

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-17.4 Blade HandlingThis chapter describ

Strany 160 - 5.6.6 GPC Dressing Template

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-2The Blade Information screen includes the following sections:• Blade Exposure Chart/Wear Rate Char

Strany 161 - 6 DICER PROCEDURES

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-3• Arrow-shaped cursor - click on a poi

Strany 162 - Dicer Procedures

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-4To Display the Wear Rate Chart:• If not already displayed, click Wear rate chart in the center of

Strany 163 - 6.1 Workpiece Alignment

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-57.4.1.3 Blade Change TabThe Blade Chan

Strany 164 - 6.1.1 Manual Alignment

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-67.4.1.4 Blade Type TabThe Blade Type tab displays the properties for the currently mounted Blade,

Strany 165 - 6.1.1.2 Defining Cut Position

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-7• The Measured Diameter is the Blade d

Strany 166 - 6.1.2 Auto Alignment

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-8The colors in the Blade Indicator bar indicate the following:Green: Blade exposure satisfactory, c

Strany 167 - To Teach the Index:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-9Securing Nut. This nut is intended for

Strany 168 - Workpiece Alignment

ADT Model 7100 Semi-Automatic Dicing System Operations ManualList of TablesP/N 97100-9002-000-14 Ver 06/05xxvLIST OF TABLESTable 6-1: Available Mode

Strany 169

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-10To Replace a Blade:1 Initiate the Blade Change procedure in one of the following ways:• Right-cli

Strany 170 - To Teach the Index Manually:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-11The new exposure value is displayed o

Strany 171 - Cut position

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-123 Attach the Spanner Tool onto the Torque Wrench and remove the Holding Nut in the center of the

Strany 172 - Align Index

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-137 Insert the new Blade into the Blade

Strany 173 - To Select an Align Type:

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-1415 Lock the Middle Securing Nut.16 Close the cutting cover.17 Click Finish. The Blade Information

Strany 174

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-15This process updates the value of Chu

Strany 175 - To Perform Teach Alignment:

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-167.4.3.2 Building a Dressing RecipeDressing Recipe is a special work program for dressing a new or

Strany 176 - • Main Model Detection

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-177.4.3.2.1 Creating a Dressing Program

Strany 177 - 6.1.3.3.1 Low Model Detection

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-184 Set the After Change Treatment parameter to Dressing.5 Open the Blade properties, double-click

Strany 178

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-197.4.3.3.2 Override ScreenInformation

Strany 179

K&S Model 7100 Semi-Automatic Dicing System Operations ManualList of TablesAdvanced Dicing Technologies Ltd.xxviTable A-22: Model Processing Para

Strany 180

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-207.4.3.3.3 Override Manual StopTo Stop the Override Dressing Process Manually1 Click the Override

Strany 181

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-21Additionally, in the Wafer Type prope

Strany 182

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-22To Display the Dressing Screen:• Click the Dressing button in the toolbar to display the follow

Strany 183 - Figure 6-18

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBlade HandlingP/N 97100-9002-000-14 Ver 06/057.4-237.4.3.4.3 Dressing Manual StopTo Stop

Strany 184 - 6.1.5 Model Types

Blade HandlingAdvanced Dicing Technologies Ltd.7.4-24

Strany 185 - 6.1.5.2 Align Kerf Model

ADT Model 7100 Semi-Automatic Dicing System Operations ManualChuck ChangeP/N 97100-9002-000-14 Ver 06/057.5-17.5 Chuck ChangeThe Model 7100 can use v

Strany 186

Chuck ChangeAdvanced Dicing Technologies Ltd.7.5-24 Follow the Wizard instructions. Click Next to install a new chuck or Finish to leave the current c

Strany 187 - 6.1.7 Rotational Shrinkage

ADT Model 7100 Semi-Automatic Dicing System Operations ManualChuck ChangeP/N 97100-9002-000-14 Ver 06/057.5-3To replace a Thick chuck with a Thin one

Strany 188 - 6.1.8 Average Index

Chuck ChangeAdvanced Dicing Technologies Ltd.7.5-46 Click on the field name Autofocus on Dicer Chuck to display the Teach button.7 Click Teach.8 Click

Strany 189

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpecial FeaturesP/N 97100-9002-000-14 Ver 06/058-18 SPECIAL FEATURESThis chapter describ

Strany 190

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/051-11 INTRODUCTIONThe Model 7100 Series is a semi-automati

Strany 191

Special FeaturesAdvanced Dicing Technologies Ltd.8-2

Strany 192

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLoad MonitoringP/N 97100-9002-000-14 Ver 06/058.1-18.1 Load MonitoringThe Load Monitor c

Strany 193 - 6.2 Cut Verification

Load MonitoringAdvanced Dicing Technologies Ltd.8.1-2The Load Monitor Workspace is divided into two graphs, the top measuring the Average Value per Cu

Strany 194 - Cut Verification

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLoad MonitoringP/N 97100-9002-000-14 Ver 06/058.1-38.1.2.2 Raw DataThe Raw Data graph il

Strany 195 - 6.2.2 Auto Cut Verification

Load MonitoringAdvanced Dicing Technologies Ltd.8.1-48.1.2.4 Load Monitor Baseline ParametersThe Baseline is the load of the Spindle when the blade is

Strany 196

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLoad MonitoringP/N 97100-9002-000-14 Ver 06/058.1-5To Access the Load Monitor Control Sc

Strany 197 - 6.3 Kerf Checking

Load MonitoringAdvanced Dicing Technologies Ltd.8.1-6

Strany 198 - 6.3.3 Kerf Check Workflow

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLanguage SelectionP/N 97100-9002-000-14 Ver 06/058.2-18.2 Language SelectionThe Model 71

Strany 199 - Kerf Checking

Language SelectionAdvanced Dicing Technologies Ltd.8.2-2The active language is displayed in the Setup and Diagnostic workspace in both English and the

Strany 200 - 6.3.4 Automatic Kerf Checking

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWafer Vacuum CheckP/N 97100-9002-000-14 Ver 06/058.3-18.3 Wafer Vacuum CheckDuring initi

Strany 201

IntroductionAdvanced Dicing Technologies Ltd.1-21.2 Standard Features The Model 7100 Series includes the following features:• Single Head dicing machi

Strany 202 - 6.3.4.1 Main Workspace Window

Wafer Vacuum CheckAdvanced Dicing Technologies Ltd.8.3-2

Strany 203 - 6.3.5 Manual Kerf Check

ADT Model 7100 Semi-Automatic Dicing System Operations ManualOpen Loop Theta Accuracy ProceduresP/N 97100-9002-000-14 Ver 06/058.4-18.4 Open Loop The

Strany 204

Open Loop Theta Accuracy ProceduresAdvanced Dicing Technologies Ltd.8.4-2performing the Stress Release. The default value for this parameter is 3.8.4.

Strany 205 - 6.3.6 Teach Kerf Check

ADT Model 7100 Semi-Automatic Dicing System Operations ManualOpen Loop Theta Accuracy ProceduresP/N 97100-9002-000-14 Ver 06/058.4-3changed angles, t

Strany 206

Open Loop Theta Accuracy ProceduresAdvanced Dicing Technologies Ltd.8.4-4

Strany 207 - To Teach the Kerf Check:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSpindle VelocityP/N 97100-9002-000-14 Ver 06/058.5-18.5 Spindle VelocityThe speed of the

Strany 208 - Figure 6-32: Teach Kerf Check

Spindle VelocityAdvanced Dicing Technologies Ltd.8.5-28.5.2 Reduced Vision Spindle VelocityThis feature allows the user to set a different spindle spe

Strany 209 - 6.3.7 Kerf Check Options

ADT Model 7100 Semi-Automatic Dicing System Operations ManualFocus Change (Initial Focus Position)P/N 97100-9002-000-14 Ver 06/058.6-18.6 Focus Chang

Strany 210

Focus Change (Initial Focus Position)Advanced Dicing Technologies Ltd.8.6-2

Strany 211 - 6.3.7.3 Adaptive Only

ADT Model 7100 Semi-Automatic Dicing System Operations ManualManual Inspection IlluminationP/N 97100-9002-000-14 Ver 06/058.7-18.7 Manual Inspection

Strany 212 - 6.3.7.6 Lower Bar

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/051-3• Exhibition Mode: This mode is intended for exhibitio

Strany 213 - 6.4 Manual Y Offset

Manual Inspection IlluminationAdvanced Dicing Technologies Ltd.8.7-2

Strany 214 - To Perform Manual Y Offset:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDatabase BackupP/N 97100-9002-000-14 Ver 06/058.8-18.8 Database BackupThe system can be

Strany 215 - 6.4.4 Y-Offset on Dress Block

Database BackupAdvanced Dicing Technologies Ltd.8.8-24 To perform the backup on a CD-RW, type the CD-RW drive (for example: E:\) in the Value line. If

Strany 216 - Cutting Location parameter

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTheta Safety Limits on X-AxisP/N 97100-9002-000-14 Ver 06/058.9-18.9 Theta Safety Limits

Strany 217 - 6.5 Special Cut Procedures

Theta Safety Limits on X-AxisAdvanced Dicing Technologies Ltd.8.9-2The axX values define the Right (see Figure 8-12) and Left (see Figure 8-13) X-limi

Strany 218 - 6.5.3 Loop Cut

ADT Model 7100 Semi-Automatic Dicing System Operations ManualChange of Length Unit TypeP/N 97100-9002-000-14 Ver 06/058.10-18.10 Change of Length Uni

Strany 219 - Special Cut Procedures

Change of Length Unit TypeAdvanced Dicing Technologies Ltd.8.10-2

Strany 220 - 6.5.5 Multi-Panel Alignment

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMulti-Panel Bar CodeP/N 97100-9002-000-14 Ver 06/058.11-18.11 Multi-Panel Bar CodeThe Ba

Strany 221

Multi-Panel Bar CodeAdvanced Dicing Technologies Ltd.8.11-28.11.2 Using the Bar Code ReaderWhile performing an Auto-Run operation or Wafer-Cut operati

Strany 222

ADT Model 7100 Semi-Automatic Dicing System Operations ManualConfiguration OptionsP/N 97100-9002-000-14 Ver 06/059-19 CONFIGURATION OPTIONSThis Chapt

Strany 223

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecord of ChangesP/N 97100-9002-000-14 Ver 06/05iiiRECORD OF CHANGESItem New Part Number

Strany 224 - 6.5.5.1 Angle Tabs

IntroductionAdvanced Dicing Technologies Ltd.1-4

Strany 225 - Figure 6-43: Removing Links

Configuration OptionsAdvanced Dicing Technologies Ltd.9-2

Strany 226

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-19.1 AutoloaderThe Autoloader option has be

Strany 227 - 6.5.7 Negative Index

AutoloaderAdvanced Dicing Technologies Ltd.9.1-2The Autoloader consists of the following components:• Mechanical Modules• Linear Arm (X Axis)• Elevato

Strany 228

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-3Linear Arm moves into position, the Upper

Strany 229 - 7 SAW PROCEDURES

AutoloaderAdvanced Dicing Technologies Ltd.9.1-4Most Autoloader features are implemented in two dedicated Workbooks: MHS (see section 9.1.2.2), which

Strany 230 - 7.1.4 Pre Non Contact Height

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-59.1.2.1 CassComp WorkbookSelect CassComp f

Strany 231 - 7.2 Blade Expansion

AutoloaderAdvanced Dicing Technologies Ltd.9.1-69.1.2.1.1 AxesThe Axes subsection of the CassComp section of the Setup & Diagnostics tree includes

Strany 232 - Blade Expansion

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-7In the lower right pane (identical for Ele

Strany 233 - 7.3 Height Procedures

AutoloaderAdvanced Dicing Technologies Ltd.9.1-8• Slow acceleration • Deceleration • Kill deceleration • Self test delay • LU - Finger Load/Unload sta

Strany 234

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-99.1.2.1.2 Cassette1Select Cassette1 from t

Strany 235 - 7.3.1 Height Reference Device

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAvailable ModelsP/N 97100-9002-000-14 Ver 06/051.6-11.6 Available ModelsSeveral configura

Strany 236 - To Perform Button Height:

AutoloaderAdvanced Dicing Technologies Ltd.9.1-10Select MHS from the Setup & Diagnostics tree to display the following: In the upper left pane of

Strany 237 - 7.3.2 Chuck Height

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-11• Initiate the MHS: Click MHS Init to in

Strany 238

AutoloaderAdvanced Dicing Technologies Ltd.9.1-12• LU Dicer - the Linear Arm Load/Unload position coordinate for the Dicer station• LU Prealign - the

Strany 239 - Height Procedures

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-139.1.3.1.2 Manual Loading/Unloading from t

Strany 240

AutoloaderAdvanced Dicing Technologies Ltd.9.1-149.1.3.1.3 Manual Loading/Unloading a WorkpieceTo Manually Load a Workpiece:Press Ctrl+L to neutralize

Strany 241 - 7.4 Blade Handling

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-159.1.3.2 Running the Model 7100 with the A

Strany 242

AutoloaderAdvanced Dicing Technologies Ltd.9.1-169.1.3.3 Loading Cassettes to the AutoloaderBefore the Autoloader can be operated, you must load a Cas

Strany 243 - 7.4.1.1.2 Wear Rate Chart

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAutoloaderP/N 97100-9002-000-14 Ver 06/059.1-17The system notifies the user by • Display

Strany 244 - 7.4.1.2 Export Data

AutoloaderAdvanced Dicing Technologies Ltd.9.1-189.1.3.5.2 Recovery After a Severe System FailureA severe failure, such as the loss of air or water pr

Strany 245 - 7.4.1.3 Blade Change Tab

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-19.2 Tilted SpindleThis option enables

Strany 246 - 7.4.1.5 Blade Status Tab

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAvailable ModelsAdvanced Dicing Technologies Ltd.1.6-2Models/ Features Vectus (2") P

Strany 247 - 7.4.2.2 Blade Indicator

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-29.2.1 Changing the Spindle Angle in a RecipeOnce the Spindle Angle is changed in the Setup screen,

Strany 248 - Blade Handling

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-39.2.3 Changing the Spindle AngleChangi

Strany 249 - To Manually Tune the BBD:

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-44 Click Save.5 In the wizard click Finish. The dicer moves to the Change station. The following me

Strany 250 - To Replace a Blade:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-58 Secure the Spindle holding screws.9

Strany 251

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-6If one of the sensors detects that the Spindle or the Camera is at a wrong angle, no angle indicat

Strany 252

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-75 In the wizard click Finish. The foll

Strany 253

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-8To Adjust the Spindle Angle1 Release the three spindle holding screws.2 Release the Spindle upper

Strany 254

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted SpindleP/N 97100-9002-000-14 Ver 06/059.2-93 Update this parameter value accordin

Strany 255 - 7.4.3 Blade Dressing

Tilted SpindleAdvanced Dicing Technologies Ltd.9.2-109.2.4.4.4 Sample Blade CalibrationTo Perform Sample Blade Calibration1Open the Blade screen.2 Ent

Strany 256

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress StationP/N 97100-9002-000-14 Ver 06/059.3-19.3 Dress StationThe Dress Station is i

Strany 257

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAvailable ModelsP/N 97100-9002-000-14 Ver 06/051.6-3Additional Models: Tilted Spindle, Au

Strany 258

Dress StationAdvanced Dicing Technologies Ltd.9.3-22 In the Menu Bar click User > Configuration. Configuration screen appears.3 Set the Dress Stati

Strany 259 - 7.4.3.3.2 Override Screen

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress StationP/N 97100-9002-000-14 Ver 06/059.3-3The new Dress Station position paramete

Strany 260

Dress StationAdvanced Dicing Technologies Ltd.9.3-4Once the Change Dress Block procedure is started, follow the Wizard instructions. Perform the follo

Strany 261 - 7.4.3.4.2 Dressing Screen

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress StationP/N 97100-9002-000-14 Ver 06/059.3-5To Teach the Dressing Block Lower-left

Strany 262

Dress StationAdvanced Dicing Technologies Ltd.9.3-6For more information about specific parameters, see Table 9-1.9.3.4 Dressing ModesThe dressing mode

Strany 263

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress StationP/N 97100-9002-000-14 Ver 06/059.3-7The blade dressing on a Dressing Block

Strany 264

Dress StationAdvanced Dicing Technologies Ltd.9.3-89.3.4.3 Dressing Block Cut MappingOnce the Dressing parameters (see section 9.3.4.1 and section 9.3

Strany 265 - 7.5 Chuck Change

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWash PipeP/N 97100-9002-000-14 Ver 06/059.4-19.4 Wash PipeThe Wash Pipe is an optional f

Strany 266 - • Calibration Start Position

Wash PipeAdvanced Dicing Technologies Ltd.9.4-2The washing mechanism is based on the Wash Pipe and a toggle move of the X axis between the two points

Strany 267 - To Re-Teach Focus on Chuck:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWash PipeP/N 97100-9002-000-14 Ver 06/059.4-3To Activate the Wash Pipe1 Click User >

Strany 268

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAvailable ModelsAdvanced Dicing Technologies Ltd.1.6-4

Strany 269 - 8 SPECIAL FEATURES

Wash PipeAdvanced Dicing Technologies Ltd.9.4-49.4.2 Model 7100 Vectus and ProVectusThe Model 7100 Vectus/ProVectus standard configuration uses the st

Strany 270 - Special Features

ADT Model 7100 Semi-Automatic Dicing System Operations ManualWash PipeP/N 97100-9002-000-14 Ver 06/059.4-59.4.3 Model 7100 Fortis and ProFortisThe op

Strany 271 - 8.1 Load Monitoring

Wash PipeAdvanced Dicing Technologies Ltd.9.4-6

Strany 272

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTroubleshootingP/N 97100-9002-000-14 Ver 06/0510-110 TROUBLESHOOTINGThe Model 7100 provi

Strany 273 - 8.1.2.2 Raw Data

TroubleshootingAdvanced Dicing Technologies Ltd.10-2

Strany 274 - Load Monitoring

ADT Model 7100 Semi-Automatic Dicing System Operations ManualError Message InformationP/N 97100-9002-000-14 Ver 06/0510.1-110.1 Error Message Informa

Strany 275 - Figure 8-4: Control Screen

Error Message InformationAdvanced Dicing Technologies Ltd.10.1-2The Error Messages Browser, located at the bottom of the error message window, is usef

Strany 276

ADT Model 7100 Semi-Automatic Dicing System Operations ManualRecipe ProblemsP/N 97100-9002-000-14 Ver 06/0510.2-110.2 Recipe ProblemsIf the system re

Strany 277 - 8.2 Language Selection

Recipe ProblemsAdvanced Dicing Technologies Ltd.10.2-2

Strany 278 - Figure 8-6)

ADT Model 7100 Semi-Automatic Dicing System Operations ManualInitializing the SystemP/N 97100-9002-000-14 Ver 06/0510.3-110.3 Initializing the System

Strany 279 - 8.3 Wafer Vacuum Check

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSystem DescriptionP/N 97100-9002-000-14 Ver 06/052-12 SYSTEM DESCRIPTIONThis chapter des

Strany 280 - Wafer Vacuum Check

Initializing the SystemAdvanced Dicing Technologies Ltd.10.3-23 From the Setup & Diagnostics tree, select Saw > Dicer to display the following:

Strany 281 - 8.4.1 Stress Release

ADT Model 7100 Semi-Automatic Dicing System Operations ManualHeight ProblemP/N 97100-9002-000-14 Ver 06/0510.4-110.4 Height ProblemIf there is a prob

Strany 282 - 8.4.2 Theta Motion Replay

Height ProblemAdvanced Dicing Technologies Ltd.10.4-2

Strany 283

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDatabase Restoration and PC RecoveryP/N 97100-9002-000-14 Ver 06/0510.5-110.5 Database R

Strany 284

Database Restoration and PC RecoveryAdvanced Dicing Technologies Ltd.10.5-2

Strany 285 - 8.5 Spindle Velocity

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCamera Installation After Emergency StopP/N 97100-9002-000-14 Ver 06/0510.6-110.6 Camera

Strany 286 - Spindle Velocity

Camera Installation After Emergency StopAdvanced Dicing Technologies Ltd.10.6-24In the Device Manager, double-click Imaging Devices. 5Right-click on 1

Strany 287

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCamera Installation After Emergency StopP/N 97100-9002-000-14 Ver 06/0510.6-39Select Har

Strany 288

Camera Installation After Emergency StopAdvanced Dicing Technologies Ltd.10.6-411 Click Next. Hardware Installation dialog box appears.12 Click Contin

Strany 289

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCamera Installation After Emergency StopP/N 97100-9002-000-14 Ver 06/0510.6-5Once the in

Strany 290

System DescriptionAdvanced Dicing Technologies Ltd.2-2

Strany 291 - 8.8 Database Backup

Camera Installation After Emergency StopAdvanced Dicing Technologies Ltd.10.6-6

Strany 292 - Database Backup

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIf Nothing HelpsP/N 97100-9002-000-14 Ver 06/0510.7-110.7 If Nothing HelpsAs in most com

Strany 293 - Figure 8-11: Dicer Tree

If Nothing HelpsAdvanced Dicing Technologies Ltd.10.7-2

Strany 294 - 13) X-limits respectively

ADT Model 7100 Semi-Automatic Dicing System Operations ManualUPS BypassP/N 97100-9002-000-14 Ver 06/0510.8-110.8 UPS BypassThe following procedure co

Strany 295 - Change of Length Unit Type

UPS BypassAdvanced Dicing Technologies Ltd.10.8-28 In the Services screen, mark PowerMon II and click Stop (see Figure 10-4). The status changes from

Strany 296

ADT Model 7100 Semi-Automatic Dicing System Operations ManualUPS BypassP/N 97100-9002-000-14 Ver 06/0510.8-311 Click OK.12 Click the Dicing System ic

Strany 297 - 8.11 Multi-Panel Bar Code

UPS BypassAdvanced Dicing Technologies Ltd.10.8-4

Strany 298 - • Blade Change - Lot number

ADT Model 7100 Semi-Automatic Dicing System Operations ManualThe Model 7100 GlossaryP/N 97100-9002-000-14 Ver 06/05A-1A APPENDICESThis chapter includ

Strany 299 - 9 CONFIGURATION OPTIONS

The Model 7100 GlossaryAdvanced Dicing Technologies Ltd.A-2The characteristics of a particular Blade.BlockA series of cuts which are defined in a reci

Strany 300 - Configuration Options

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/05A-3(plural: Dice)That portion of a Workpiece which has be

Strany 301 - 2 Autoloader

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMain SubsystemsP/N 97100-9002-000-14 Ver 06/052.1-12.1 Main Subsystems2.1.1 Front PanelT

Strany 302

The Model 7100 GlossaryAdvanced Dicing Technologies Ltd.A-43 Non-Contact Height Secondary Device detects if the beam is obstructed by the Blade.4 Chuc

Strany 303 - Autoloader

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/05A-5MixedThe workpiece is cut in both directions, i.e. it

Strany 304

The Model 7100 GlossaryAdvanced Dicing Technologies Ltd.A-6SupplierADT production personnel, field engineers and customer support personnel.TableRotat

Strany 305 - 9.1.2.1 CassComp Workbook

ADT Model 7100 Semi-Automatic Dicing System Operations ManualP/N 97100-9002-000-14 Ver 06/05A-7X-AxisX-Axis components move left and right. See also

Strany 306 - 9.1.2.1.1 Axes

AlgorithmsCut AlgorithmsAdvanced Dicing Technologies Ltd.A-8Appendix 2: AlgorithmsThe Model 7100 software contains the algorithms described in the fol

Strany 307

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAlign AlgorithmsP/N 97100-9002-000-14 Ver 06/05A-9to cut regular round or rectangular Wo

Strany 308 - Figure 9-5: Finger Screen

AlgorithmsKerf Check AlgorithmAdvanced Dicing Technologies Ltd.A-10Alignment to be performed, the Align Type parameter must be specified as Dress Manu

Strany 309 - 9.1.2.2 MHS Workbook

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf Check Teach AlgorithmP/N 97100-9002-000-14 Ver 06/05A-11• Type• Wafer Mounting Angl

Strany 310

Recipe ParametersAir ParametersAdvanced Dicing Technologies Ltd.A-12Appendix 3: Recipe ParametersThe Model 7100 software contains the parameters descr

Strany 311 - Figure 9-8: MHS Axes Screen

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAlign ParametersP/N 97100-9002-000-14 Ver 06/05A-13Align ParametersTable A-2 lists the A

Strany 312 - 9.1.3 Autoloader Operation

Main SubsystemsAdvanced Dicing Technologies Ltd.2.1-2The ON button powers on the Components and the PC, which then starts loading the software. When t

Strany 313

Recipe ParametersAlign ParametersAdvanced Dicing Technologies Ltd.A-14Align Index ToleranceThe permitted variation between the index found during Alig

Strany 314 - To Manually Load a Workpiece:

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAlign ParametersP/N 97100-9002-000-14 Ver 06/05A-15AlignMain Model High Score (%)The thr

Strany 315

Recipe ParametersAlign ParametersAdvanced Dicing Technologies Ltd.A-16AlignSpiral-Index Search Width (Y)The width of the spiral search area outside th

Strany 316

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAlign ParametersP/N 97100-9002-000-14 Ver 06/05A-17Align TypeThe way Auto Alignment is p

Strany 317

Recipe ParametersAlign Kerf Model ParametersAdvanced Dicing Technologies Ltd.A-18Align Kerf Model ParametersTable A-3 lists the parameters in the Alig

Strany 318

ADT Model 7100 Semi-Automatic Dicing System Operations ManualAuto Height CompensationP/N 97100-9002-000-14 Ver 06/05A-19* These parameters are availa

Strany 319 - 9.2 Tilted Spindle

Recipe ParametersAverage Index ParametersAdvanced Dicing Technologies Ltd.A-20Average Index ParametersTable A-5 lists the parameters in the Average In

Strany 320 - Tilted Spindle

ADT Model 7100 Semi-Automatic Dicing System Operations ManualBar Code ParametersP/N 97100-9002-000-14 Ver 06/05A-21Bar Code ParametersTable A-6 lists

Strany 321

Recipe ParametersBlade ParametersAdvanced Dicing Technologies Ltd.A-22Blade ParametersTable A-7 lists the Blade parameters. Blade parameters are used

Strany 322

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut Depth CompP/N 97100-9002-000-14 Ver 06/05A-23Cut Depth CompTable A-8 lists the Cut D

Strany 323

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMain SubsystemsP/N 97100-9002-000-14 Ver 06/052.1-3In systems with Autoloader, the Stop

Strany 324

Recipe ParametersCut ParametersAdvanced Dicing Technologies Ltd.A-24Cut ParametersTable A-9 lists the parameters in the Cut category. Cut parameters d

Strany 325 - 9.2.4 Mechanical Adjustments

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut ParametersP/N 97100-9002-000-14 Ver 06/05A-25CutCut Map Build DirectionDefines the d

Strany 326 - To Adjust the Camera position

Recipe ParametersCut ParametersAdvanced Dicing Technologies Ltd.A-26Cut Entry OvercutThe distance for which the entry speed is maintained to ensure th

Strany 327

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut ParametersP/N 97100-9002-000-14 Ver 06/05A-27Cut OvertravelThe distance along the X-

Strany 328

Recipe ParametersCut Verify ParametersAdvanced Dicing Technologies Ltd.A-28The following diagram illustrates the velocity and travel of the X-Axis dur

Strany 329 - 9.3 Dress Station

ADT Model 7100 Semi-Automatic Dicing System Operations ManualCut Verify ParametersP/N 97100-9002-000-14 Ver 06/05A-29Cut Verify Number of ModelsEnabl

Strany 330 - Dress Station

Recipe ParametersCut Verify Limit ParametersAdvanced Dicing Technologies Ltd.A-30Cut Verify Limit ParametersTable A-11 lists the Cut Verify Limit para

Strany 331

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDiagnostisc ParametersP/N 97100-9002-000-14 Ver 06/05A-31Diagnostisc ParametersTable A-1

Strany 332 - To Replace the Dressing Block

Recipe ParametersDress Block ParametersAdvanced Dicing Technologies Ltd.A-32Dress Block ParametersTable A-14 lists the parameters in the Dress Block c

Strany 333 - 9.3.3 Dress Station Setup

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDress Block ParametersP/N 97100-9002-000-14 Ver 06/05A-33Dress Block Dress/Chop DepthCut

Strany 334 - 9.3.4 Dressing Modes

Safety FirstAdvanced Dicing Technologies Ltd.ivSAFETY FIRSTAdvanced Dicing Technologies Ltd. believes that the safety of personnel working with and ar

Strany 335 - 9.3.4.2 Chop Mode

Main SubsystemsAdvanced Dicing Technologies Ltd.2.1-4• The AC Input light is lit to indicate presence of AC power in the System.• The 24 VDC light is

Strany 336

Recipe ParametersHeight ParametersAdvanced Dicing Technologies Ltd.A-34Height ParametersTable A-15 lists the parameters in the Height category. Height

Strany 337 - 9.4 Wash Pipe

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf Check ParametersP/N 97100-9002-000-14 Ver 06/05A-35Kerf Check ParametersTable A-16

Strany 338 - Wash Pipe

Recipe ParametersKerf Check ParametersAdvanced Dicing Technologies Ltd.A-36Kerf Check Last Cut No.The Street where Kerf Checking ends. Possible Values

Strany 339 - 9.4.1 Manual Operation

ADT Model 7100 Semi-Automatic Dicing System Operations ManualKerf Check Limit ParametersP/N 97100-9002-000-14 Ver 06/05A-37Kerf Check Limit Parameter

Strany 340

Recipe ParametersKerf Check Limit ParametersAdvanced Dicing Technologies Ltd.A-38Kerf Check LimitHead1 Center-To-Max ChipThe maximum distance permitte

Strany 341

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLoad Monitor Cutting ParametersP/N 97100-9002-000-14 Ver 06/05A-39Load Monitor Cutting P

Strany 342

Recipe ParametersLoop Cut ParametersAdvanced Dicing Technologies Ltd.A-40Loop Cut ParametersTable A-20 lists the parameters in the Loop Cut category.

Strany 343 - 10 TROUBLESHOOTING

ADT Model 7100 Semi-Automatic Dicing System Operations ManualManual Inspection ParametersP/N 97100-9002-000-14 Ver 06/05A-41Manual InspectionCoaxial

Strany 344 - Troubleshooting

Recipe ParametersModel Precessing ParametersAdvanced Dicing Technologies Ltd.A-42Model Precessing ParametersTable A-22 lists the parameters in the Mod

Strany 345

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMHS ParametersP/N 97100-9002-000-14 Ver 06/05A-43MHS ParametersTable A-23 lists the para

Strany 346 - Error Message Information

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMain SubsystemsP/N 97100-9002-000-14 Ver 06/052.1-52.1.2.1 Vision SystemThe Model 7100 S

Strany 347 - 10.2 Recipe Problems

Recipe ParametersShrinkage ParametersAdvanced Dicing Technologies Ltd.A-44Shrinkage ParametersTable A-26 lists the parameters in the Rotational Shrink

Strany 348 - Recipe Problems

ADT Model 7100 Semi-Automatic Dicing System Operations ManualShrinkage ParametersP/N 97100-9002-000-14 Ver 06/05A-45ShrinkageAlign Correction Verific

Strany 349 - 10.3 Initializing the System

Recipe ParametersTeach Center ParametersAdvanced Dicing Technologies Ltd.A-46Teach Center ParametersTable A-27 lists the parameters in Teach Center ca

Strany 350 - Initializing the System

ADT Model 7100 Semi-Automatic Dicing System Operations ManualTilted Spindle ParametersP/N 97100-9002-000-14 Ver 06/05A-47Tilted Spindle ParametersTab

Strany 351 - 10.4 Height Problem

Recipe ParametersY Offset ParametersAdvanced Dicing Technologies Ltd.A-48Y Offset ParametersTable A-30 lists the parameters in the Y Offset category.

Strany 352 - Height Problem

ADT Model 7100 Semi-Automatic Dicing System Operations ManualY Offset ParametersP/N 97100-9002-000-14 Ver 06/05A-49Y OffsetY Offset After Blade Chang

Strany 353

Recipe ParametersY Offset ParametersAdvanced Dicing Technologies Ltd.A-50

Strany 354

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIndexP/N 97100-9002-000-14 Ver 06/05Index-iINDEXAAccess Levels, 4-1, A-1Administrator, A

Strany 355

IndexAdvanced Dicing Technologies Ltd.Index-iiHubless, A-4Indicators, 2.2-10, 7.4-7Information, 7.4-1Wear, 7.4-2Blade Angle Factor, A-23Blade Change,

Strany 356

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIndexP/N 97100-9002-000-14 Ver 06/05Index-iiiDie Model, 6.1-22, A-3Display Controls, 2.2

Strany 357 - Wizard appears

Main SubsystemsAdvanced Dicing Technologies Ltd.2.1-6• Coaxial: Vertical illumination passing through the Microscope, generally used on silicon Workpi

Strany 358

IndexAdvanced Dicing Technologies Ltd.Index-ivHelp Menu, 2.2-5High AVG Limit, A-39IIllumination, 2.1-5coaxial, 2.1-6oblique, 2.1-6Oblique (Ring), 2.2-

Strany 359 - KMI and Database

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIndexP/N 97100-9002-000-14 Ver 06/05Index-vFirst Cut No. Parameter, A-41Focus on Kerf St

Strany 360

IndexAdvanced Dicing Technologies Ltd.Index-viPParameters, A-12access, 4.2-1adding, 4.2-2, 5.4-8categories, 5.4-2defining, 5.4-8deleting, 4.2-2, 5.4-1

Strany 361 - 10.7 If Nothing Helps

ADT Model 7100 Semi-Automatic Dicing System Operations ManualIndexP/N 97100-9002-000-14 Ver 06/05Index-viiTheta Safety Limits on X-Axis, 8.9-1Theta T

Strany 362

IndexAdvanced Dicing Technologies Ltd.Index-viiiY Offset Parameters, A-48Y Offset Reference Position Parameter, A-49Y Offset, reference position, 6.4-

Strany 363 - 10.8 UPS Bypass

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMain SubsystemsP/N 97100-9002-000-14 Ver 06/052.1-72.1.3.1 Stand-alone Buzzer on Light T

Strany 364 - UPS Bypass

Main SubsystemsAdvanced Dicing Technologies Ltd.2.1-8a. Open the main workspace Configuration screen.b. In the value column, next to the parameter Dig

Strany 365

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-12.2 Graphical User Interface

Strany 366

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-22.2.1 Menu BarThe menu bar in the main window contains seven menus, described on the fol

Strany 367 - A APPENDICES

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-32.2.1.3 Load Monitor MenuThe

Strany 368 - The Model 7100 Glossary

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-42.2.1.5 Maintenance MenuThe Maintenance menu contains the following menu options:Blade T

Strany 369

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-52.2.1.6 Help MenuThe Help me

Strany 370

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSafety FirstP/N 97100-9002-000-14 Ver 06/05vSafety FeaturesOur Systems are equipped with

Strany 371

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-62.2.2.1 Additional Tools - Main & Video WorkspaceIn the Main Workspace and Video Wor

Strany 372

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-72.2.2.2 Additional Tools - P

Strany 373

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-82.2.2.3 Additional Tools - Workbook WorkspaceIn the Workbook Workspace, the toolbar cont

Strany 374 - Appendix 2: Algorithms

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-92.2.3.4 Wafer Holder GaugeWa

Strany 375 - Align Algorithms

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-102.2.5 Active User FieldThe Active User field displays the current recipe file name assi

Strany 376 - Bright Kerf Algorithm

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-112.2.8 Run ButtonThe Run But

Strany 377 - Kerf Check Teach Algorithm

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-12If the Stop button is clicked, while the system is in Auto Run mode, the system finishe

Strany 378 - Appendix 3: Recipe Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-13• Video Workspace: Displays

Strany 379 - Align Parameters

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-142.2.10.1 Main WorkspaceThe Main Workspace is automatically displayed when the software

Strany 380 - Recipe Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-152.2.10.1.1 Top View AreaThe

Strany 381

Safety FirstAdvanced Dicing Technologies Ltd.vidisplayed if the Spindle Cover is opened while an Axis is moving or when a bypass key is used. The Axes

Strany 382

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-16• Show Z view: Toggles the display of the Side View area (see section 2.2.10.1.2).• Sho

Strany 383

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-172.2.10.1.2 Side View AreaTh

Strany 384 - Align Kerf Model Parameters

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-182.2.10.2 Video WorkspaceThe Video Workspace is selected by clicking in the main windo

Strany 385 - Auto Height Compensation

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-19In other operation modes, t

Strany 386 - Average Index Parameters

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-20ReticleThe Reticle consists of green crosshairs that are used to pinpoint a location on

Strany 387 - Bar Code Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-21Clicking on an axis button

Strany 388 - Blade Parameters

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-22Double-clicking any point in the FOV bring the FOV center to that point. Center-clickin

Strany 389 - Max Cut Width

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-232.2.10.2.3 Zoom ControlsDig

Strany 390 - Cut Parameters

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-24After configuring the Zoom option, magnification can be set in the Video Workspace by u

Strany 391

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-25• Clicking the “ticker” up

Strany 392

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSafety FirstP/N 97100-9002-000-14 Ver 06/05viiThe Load/Unload Interlock can be locked an

Strany 393

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-26WizardThe Wizard tab displays step-by-step instructions for carrying out a selected pro

Strany 394 - Cut Verify Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-27ModelAfter the Teach proced

Strany 395

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-28The colors of the Indexes on the Cut Map reflect the following:• Yellow (blinking): The

Strany 396 - Cut Verify Limit Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-292.2.10.3 Programming Worksp

Strany 397 - Dressing Parameters

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-30parameters for that category on the right of the Programming Workspace, as follows:Para

Strany 398 - Dress Block Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-31There are three workbooks,

Strany 399

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-32Overflow SensorIn the Setup & Diagnostics tree, under Saw, the Overflow sensor is d

Strany 400 - Height Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-332.2.10.4.2 Calibration Work

Strany 401 - Kerf Check Parameters

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-34SensorsThe following sensors are listed under Sensor Calibration (see Figure 2-10):• Ma

Strany 402

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-352.2.10.5 Load Monitor Works

Strany 403 - Kerf Check Limit Parameters

Before You BeginAdvanced Dicing Technologies Ltd.viiiBEFORE YOU BEGINThis ManualBefore you begin to work with the 7100 Dicing Series machine, please r

Strany 404

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-36Figure 2-12: Dressing WorkspaceFigure 2-13: Override Workspace

Strany 405 - Load Monitor Baseline

ADT Model 7100 Semi-Automatic Dicing System Operations ManualGraphical User InterfaceP/N 97100-9002-000-14 Ver 06/052.2-37The Blade Info/Override/Dre

Strany 406 - Manual Inspection Parameters

Graphical User InterfaceAdvanced Dicing Technologies Ltd.2.2-38

Strany 407

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSystem ConfigurationP/N 97100-9002-000-14 Ver 06/052.3-12.3 System ConfigurationThe Conf

Strany 408 - Model Precessing Parameters

System ConfigurationAdvanced Dicing Technologies Ltd.2.3-2

Strany 409 - Override Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualMenu Navigation ChartP/N 97100-9002-000-14 Ver 06/052.4-12.4 Menu Navigation Chart

Strany 410 - Shrinkage Parameters

Menu Navigation ChartAdvanced Dicing Technologies Ltd.2.4-2

Strany 411

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSystem OperationP/N 97100-9002-000-14 Ver 06/053-13 SYSTEM OPERATIONThis chapter describ

Strany 412 - Teach Center Parameters

System OperationAdvanced Dicing Technologies Ltd.3-2

Strany 413 - Wash Pipe Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualPowering Up/Down ProceduresP/N 97100-9002-000-14 Ver 06/053.1-13.1 Powering Up/Down Proc

Strany 414 - Y Offset Parameters

ADT Model 7100 Semi-Automatic Dicing System Operations ManualContents at a GlanceP/N 97100-9002-000-14 Ver 06/05ixContents at a GlanceChapter 1: Intr

Strany 415

Powering Up/Down ProceduresAdvanced Dicing Technologies Ltd.3.1-2Restore dialog window that appears on the monitor screen after an abnormal shut down:

Strany 416

ADT Model 7100 Semi-Automatic Dicing System Operations ManualPowering Up/Down ProceduresP/N 97100-9002-000-14 Ver 06/053.1-33.1.2 Powering Down the S

Strany 417 - See Height

Powering Up/Down ProceduresAdvanced Dicing Technologies Ltd.3.1-4

Strany 418 - See Assigning Recipes

ADT Model 7100 Semi-Automatic Dicing System Operations ManualLogging InP/N 97100-9002-000-14 Ver 06/053.2-13.2 Logging InWhen the Model 7100 software

Strany 419 - See Override

Logging InAdvanced Dicing Technologies Ltd.3.2-2

Strany 420 - Index-iv

ADT Model 7100 Semi-Automatic Dicing System Operations ManualSystem InitializationP/N 97100-9002-000-14 Ver 06/053.3-13.3 System InitializationOnce t

Strany 421

System InitializationAdvanced Dicing Technologies Ltd.3.3-2

Strany 422 - See Workpiece

ADT Model 7100 Semi-Automatic Dicing System Operations ManualDefining the JobP/N 97100-9002-000-14 Ver 06/053.4-13.4 Defining the JobDefining the job

Strany 423

Defining the JobAdvanced Dicing Technologies Ltd.3.4-2To Assign a Recipe From the Setup & Diagnostics Workbook:1 Click in the toolbar to display

Strany 424 - Index-viii

ADT Model 7100 Semi-Automatic Dicing System Operations ManualPlacing/Removing a WorkpieceP/N 97100-9002-000-14 Ver 06/053.5-13.5 Placing/Removing a W

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